ASMi A400 Dual Boat Poly / HT Oxide Vertical Furnace

ASMi A400 Dual Boat Poly / HT Oxide Vertical Furnace

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Description

ASMi A400 HT Oxide / Poly

Basic configuration:

• ASMi A400 HT Oxide / Poly

• Vintage 1998

• Dual reactors /Dual boats

• Boat Rotation (poly)

• 5 temperature zones

• New CE certification

Final configuration TBD machine will be build to end-user

specification 

Specifications

ManufacturerASMi
ModelA400
Year1998
ConditionUsed
Stock Numberem1380
WAFER SIZE200mm