ASMi A400 Dual Boat Poly / HT Oxide Vertical Furnace
ASMi A400 Dual Boat Poly / HT Oxide Vertical Furnace
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Description
ASMi A400 HT Oxide / Poly
Basic configuration:
• ASMi A400 HT Oxide / Poly
• Vintage 1998
• Dual reactors /Dual boats
• Boat Rotation (poly)
• 5 temperature zones
• New CE certification
Final configuration TBD machine will be build to end-user
specification
Specifications
Manufacturer | ASMi |
Model | A400 |
Year | 1998 |
Condition | Used |
Stock Number | em1380 |
WAFER SIZE | 200mm |