2007 Sokudo Co., Ltd. RF-300A
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Description
Sokudo Co., Ltd. RF-300A Multi Block (Resist Coater/Developer)
Currently Configured for 300mm wafer size
MFG Date: 2007
EQUIPMENT DETAILS:
Process: Track
MC Configuration (# COT/# DEV): 3 COT/ 5 DEV
Wafer Direction (RtoL or LtoR): L to R
Accessory
AC Power BOX
- AC Power Cable : 3 Phase
COATER Units
1) Unit
- Resist Nozzles (Qty):8
- Resist Pumps (type): PDS 105C
- EBR / RRC /
- Temp/Humidity Sensor: Y
- PR auto exchange system: Y
- Photo resist temperature controll installed: Y
- Motor Flange temperature controll installed: Y
Develop Units
1) 3-1 Unit
- Rinse: Top rinse (qty nozzles) 1
- Developer Temp control installed: Y
- Auto damper installed: Y
- Auto dummy rainse installed: Y
All Units Q`ty
- Coater units (Qty): 3
- Develop units (Qty): 5
- AHL units (Qty):3
- P-RHP units (Qty):10
- HP units (Qty):3
- RHP units (Qty):3
- CP units (Qty):6
- ADH units (Qty):3
- TRS units (Qty):4
- WEE Units (Qty):2
- PEB Units (Qty):4
- IRA Block: Y
- CSB: Y
-TRS: Y
Specifications
Manufacturer | Sokudo Co., Ltd. |
Model | RF-300A |
Year | 2007 |
Condition | Used |
Stock Number | em1247 |
WAFER SIZE | 300mm |