JEOL JWS-7555
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Description
JEOL JWS-7555
SEM - Defect Review (DR)
Currently Configured for 200mm wafer size
MFG Date: TBC
EQUIPMENT DETAILS:
Inspect to confirm configuration and condition.
Missing parts list as below:
a. Dry pump
b. turbo pump
c. emitter / gasket
d. hard disk
e. ceramic arm
f. exchange chamber o-ring
No EDS.
Stage and check need to open the chamber, but now can not to open chamber.
Specifications
Manufacturer | JEOL |
Model | JWS-7555 |
Condition | Used |
Stock Number | em1232 |
WAFER SIZE | 200mm |