Carl Zeiss Group Axiotron 300
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Description
Carl Zeiss Group Axiotron 300
Microscope
Currently Configured for 300mm wafer size
EQUIPMENT DETAILS:
Process: Inspection
200mm/300 mm wafer inspection and review station
configured for brightfield (VIS and 337nm UV), darkfield, DIC (Nomarski) observation, CSM
Programed settings for light, aperture, zoom, field stop and DIC analyzer
Newport Kensington XY stage with 300mm x 300mm travel and 300mm vacuum wafer chuck
Zeiss Objectives:
Epiplan Neofluar 10x/0.30 HD DIC
Epiplan Apochromat 50x/0.90 HD DIC
Epiplan Apochromat 100x/0.95 HD DIC
Epiplan Apochromat 150x/0.95
Epiplan UV Insp 120x/0.95
TI MP-2000PF-U5 camera
Optronix S97670 camera and DEI-750D controller
MEG system with Hg-Xe lamp source
Zeiss LG-Xe 180w remote xenon illumination source
Zeiss 45 74 92 dual beam laser
autofocus (AF) assembly
Thermo VSL-337ND-S 337nm nitrogen laser
Photonic Instruments Micro-Point 2202/2279 assembly
Halcyonics (Accurian) MOD-2M active vibration isolation controller
MS Windows 2000 Professional operating system
CE Marked
Specifications
Manufacturer | Carl Zeiss Group |
Model | Axiotron 300 |
Condition | Used |
Stock Number | em1227 |