Tokyo Electron Ltd. Expedius
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Description
Tokyo Electron Ltd. Expedius Batch Wafer Processing
Currently Configured for 300mm wafer size
MFG Date: TBC
EQUIPMENT DETAILS:
Tool is currently located in on-site storage.
Labelled as Collateral Assets.
[Bath 1]
LAL30(20deg,16.5l/min)
Bath material :PTFE
Chuck material :PCTFE
[Bath 2]
Cold DIW rinse(25deg,40~80l/min)MFB
Bath material :Quartz
[DRYER1]
type SD2
1:200DHF
IPA/N2 200deg
100l/min
[DRYER2]
type SD2
1:200DHF
IPA/N2 200deg
100l/min
Other options:
Chemilcal filter for acid removal and organic removal
Specifications
Manufacturer | Tokyo Electron Ltd. |
Model | Expedius |
Condition | Used |
Stock Number | EM1211 |
WAFER SIZE | 300MM |