2001 Tokyo Electron Ltd. NS 300
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Description
Tokyo Electron Ltd. NS 300 Wafer Scrubber
MFG Date: 2001
EQUIPMENT DETAILS:
• Currently Configured for 300mm wafer sizes
• (3) 300mm FOUP Load Ports
• (1) Cassette Station Arm (CS Arm)
• (1) Process Station Arm (PS Arm)
• (2) Frontside Scrub Process Stations (F.Scr)
• (2) Backside Scrub Process Stations (B.Scr)
• (2) Auto Reversing Stations (A.RVS)
• Supporting Equipment:
o AC Power Box
Specifications
Manufacturer | Tokyo Electron Ltd. |
Model | NS 300 |
Year | 2001 |
Condition | Used |
Stock Number | em1209 |
WAFER SIZE | 300mm |