2007 P.S.K. Tech Inc Supra IV
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Available quantity:5
Description
P.S.K. Tech Inc. Supra IV Stripper/Asher
Currently Configured for 300mm wafer size
MFG Date: 2007
EQUIPMENT DETAILS:
Process: STRIP
Tool config is based on original PO, please verify tool details at tool inspection
Main Body
Load Port- Fixed Buffer: Qty 3
System wide corrosion free:Yes(SUS304)
Wafer Breakage Detection
LCD Monitor:VX1500M-T
System Controller
CPU Pentium 4
Hard disk 80GB
1st data back-up 3.5" FDD
2nd data back-up CD-RW
Operation Monitor 15" LCD
Signal Tower 4 color Dual Polemount Type
R.C.S(Remote Control System)
Utility
Main Power 3ψ 208VAC 60HZ 250A
UPS Power 1ψ 208VAC 60HZ 63A
Power Vaccine 1sec
Electric & signal cable Length 20M
UPS Battery YES
Circuit Break Type MCCB Type
Water Manifold valve Shut off v/v
All Utility Feed Direction Bottom-up feed
Transfer module
TM ROBOT Body 1 SR8232-0003AAR
TM ROBOT Controller 1 SC3150
TM ROBOT Power box 1
EFEM ROBOT 1 SR8240-0001AAS
Chamber 1 & 2
Dry Pump
APC valve 1 653B-4-100-2
APC Controller 1 651C-26831
Baratron Sensor 1 626A02TBE
Pressure Transducer (pirani) 1 750B13TCD2GG
EPD Controller 2 NEFL-309S
Heater Module 2
PICP 2 5284-3930020-C-S
Generator 2 AX7690PSK-04
Gas Box IGS Type 1
Pressure Control Throttle Valve 1
Chamber 1 & 2 process gas line
GAS #1(O2) 10slm 1 TCFC-PA786CT-BF
GAS #2(N2) 3slm 1 TCFC-PA786CT-BF
GAS #4(NH3) 5slm 1 TCFC-PA786CT-BF
GAS #4(H2N2) 5slm 1 TCFC-PA786CT-BF
Purity 10RA 1
MFC Signal Digital 1
Gas Line Polishing Electrical Polished 1
Regulator 6
Air Operated Valve 6
Filter 1
Pressure Transducer 6
Damage/Missing parts list
Dry pumps are not included with sales
Please inspect tool to reconfirm
Specifications
Manufacturer | P.S.K. Tech Inc |
Model | Supra IV |
Year | 2007 |
Condition | Used |
Stock Number | em1182 |
WAFER SIZE | 300mm |