2006 Tokyo Electron Ltd. Trias W

Vintage: 2006 (1)

2005 (1)

Tokyo Electron Ltd. Trias W

Currently Configured for: 300mm

Asset HDD not included

OEM  TEL

Tool Model  Trias

Process  SFD-W

Software Version (include revision #) V3.24R4

System Power Rating  200 AC 3-Phase / 200 AC 1-Phase

Loading Configuration   FOUP 25 slots cassette V5 (LOADPORT)

[Chamber A]

Process: W

Hard: SFD

Gas(sccm): WF6(150/450), ClF3(1000), Ar(7000), SiH4(200/800), H2(2000/6000), N2(2000), Ar(7000), H2(1000/3000)

[Chamber B]

Process: W

Hard: SFD

Gas(sccm): WF6(150/450), ClF3(1000), Ar(7000), SiH4(200/800), H2(2000/6000), N2(2000), Ar(7000), H2(1000/3000)

[Chamber C]

Process: W

Hard: SFD

Gas(sccm): WF6(150/450), ClF3(1000), Ar(7000), SiH4(200/800), H2(2000/6000), N2(2000), Ar(7000), H2(1000/3000)