1996 Canon FPA 3000 i4 Stepper
1996 Canon FPA 3000 i4 Stepper
Contact us for price
Available quantity:4
orCall +353 (0) 87 192 1110
Description
4 units of Canon i4 Steppers for sale, they are like an i11D. (350nm resolution)
Vintages: 3x 1995 1x1996
Configuration: left inline system; Inline with TEL Mark 7-S Coater Developer
8" wafer chuck;
Nikon Type Reticle changer; 6" Reticle
major hardware and software changes in control system: EWS type changed to HP B180, O/S changed to HP-UX 10.20, original X-Terminal replaced by a Windows PC + 17" touchscreen TFT
Hg lamp will be removed prior shipping
Coolant will be removed prior shipping
Batteries will be removed prior shipping
no UPS installed. No printer installed. No MO-drive
EOL: optical parts
Last Time in production: 05/24
Good Condition
Specifications
Manufacturer | Canon |
Model | FPA 3000 i4 Stepper |
Year | 1995 |
Condition | Used |
Stock Number | GOD23082023720223440 |