Varian Viista HC High Current Implanter

This system is complete and is now deinstalled and in storage.

There is also a parts system which you can also take for free in addition to this complete system.

1 Process Chamber

Software: VCS7.55SP22

Energy Range: 200eV ~ 60keV

Dose Range: 2e13~5e16

All 6 pumps included, see pictures for reference.