2000 Eaton NV GSD 200E / 80 HC Implanter

2000 Eaton NV GSD 200E / 80 HC Implanter

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Description

Eaton GSD200E/80 Highcurrent

  • Energy Config: 0 - 80Kv Highcurrent
  • Build Year:        2000
  • Date of first usage:        begin of year 2001
  • Current Condition:        Good
  • CE-Conformity:              Yes
  • Cryo-Pumps:   CTI/Edwards Onboard; OB-8 + OB-10 fully refurbed included!!
  • Cryo-Compressor:        CTI 9650 Low-Voltage
  • Turbo-Pumps: Seiko STP A2203 fully refurbed included!!
  • Terminal-Rough-Pump:              without (Edwards Config)
  • Endstation Rough-Pump:           without (Edwards Config)
  • Wafersize:         200mm
  • Disk-Type:         Si-coated Disk fully refurbed included!!
  • Wafer-Cooling: no Disk-Chiller included !
  • Gasbox:             5-String, 4x Toxic-Low-Pressure
  • String1:               PH3 SDS-Low-Pressure Type VCR 1/2"; MFC MKS-1640A; 5sccm-AsH3
  • String2:               BF3 SDS-Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3
  • String3:               AsH3 SDS-Low-Pressure Type VCR 1/2"; MFC MKS-1640A; 5sccm-AsH3
  • String4:               SIF4 Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3
  • String5:               Argon Carrier gas; MFC Brooks GF120 10sccm-N2
  • Disk-Drive:       Direct-Drive
  • Dose-Type:       Regular
  • Source-Type:   ELS4 IHC-Source without Vaporizer
  • Highvoltage-Transformer:          dry
  • Light-Tower:     red/yellow/green; no buzzer
  • Main-Workstation         SUN Solaris AXI 3HE
  • Second-Workstation   without
  • Software-Version:         6.13.5.1 (no license included)
  • Network:           24port 100MB Ethernet with Cisco Router-Kit
  • Cell-Controller:              V6 Type
  • Condition          tool run fully productive (24/7) between 15 and 80kv Energy until we switched it off on 07/2024
  • Availability       Immediately. Start of shipment at the earliest 8 weeks after receipt of payment due to decontamination, dismantling and packing of the tool. Depending on the availability of external service providers
  • Notes:
  • Slight corrosion spots on the frame, just a visual matter
  • Clean-Room Table on frontside not included
  • Original Lower Machine Front Panels not included (below the Table)
  • Rough-Pumps not included
  • Endstation Flowhood not included
  • Disk-Chiller not included
  • Modified Plasma-Gun Power-Supply installed(TDK)
  • Minor modifications on tool
  • No Manual-Set/ no Spares
  • If required, tool can be inspected on site

Specifications

ManufacturerEaton
ModelNV GSD 200E / 80 HC Implanter
Year2000
ConditionUsed
Stock NumberGOD23082023720223407
* Wafersize200mm