2000 Eaton NV GSD 200E / 80 HC Implanter
2000 Eaton NV GSD 200E / 80 HC Implanter
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Description
Eaton GSD200E/80 Highcurrent
- Energy Config: 0 - 80Kv Highcurrent
- Build Year: 2000
- Date of first usage: begin of year 2001
- Current Condition: Good
- CE-Conformity: Yes
- Cryo-Pumps: CTI/Edwards Onboard; OB-8 + OB-10 fully refurbed included!!
- Cryo-Compressor: CTI 9650 Low-Voltage
- Turbo-Pumps: Seiko STP A2203 fully refurbed included!!
- Terminal-Rough-Pump: without (Edwards Config)
- Endstation Rough-Pump: without (Edwards Config)
- Wafersize: 200mm
- Disk-Type: Si-coated Disk fully refurbed included!!
- Wafer-Cooling: no Disk-Chiller included !
- Gasbox: 5-String, 4x Toxic-Low-Pressure
- String1: PH3 SDS-Low-Pressure Type VCR 1/2"; MFC MKS-1640A; 5sccm-AsH3
- String2: BF3 SDS-Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3
- String3: AsH3 SDS-Low-Pressure Type VCR 1/2"; MFC MKS-1640A; 5sccm-AsH3
- String4: SIF4 Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3
- String5: Argon Carrier gas; MFC Brooks GF120 10sccm-N2
- Disk-Drive: Direct-Drive
- Dose-Type: Regular
- Source-Type: ELS4 IHC-Source without Vaporizer
- Highvoltage-Transformer: dry
- Light-Tower: red/yellow/green; no buzzer
- Main-Workstation SUN Solaris AXI 3HE
- Second-Workstation without
- Software-Version: 6.13.5.1 (no license included)
- Network: 24port 100MB Ethernet with Cisco Router-Kit
- Cell-Controller: V6 Type
- Condition tool run fully productive (24/7) between 15 and 80kv Energy until we switched it off on 07/2024
- Availability Immediately. Start of shipment at the earliest 8 weeks after receipt of payment due to decontamination, dismantling and packing of the tool. Depending on the availability of external service providers
- Notes:
- Slight corrosion spots on the frame, just a visual matter
- Clean-Room Table on frontside not included
- Original Lower Machine Front Panels not included (below the Table)
- Rough-Pumps not included
- Endstation Flowhood not included
- Disk-Chiller not included
- Modified Plasma-Gun Power-Supply installed(TDK)
- Minor modifications on tool
- No Manual-Set/ no Spares
- If required, tool can be inspected on site
Specifications
Manufacturer | Eaton |
Model | NV GSD 200E / 80 HC Implanter |
Year | 2000 |
Condition | Used |
Stock Number | GOD23082023720223407 |
* Wafersize | 200mm |