2007 Applied Materials Inc VIISTA 810HP

MED current implanter- HP

Status: Crated

 Manufacturer: Varian Semiconductor Equipment Associates

 Model: VIISTA 810HP

 Wafer Size: 300mm

 VIISTA 810HP End Station (Universal End Station with polished load lock chambers)

 UES Buffer with low-force End Effectors

 Tilt Assembly: Tilt modes up to +45 degrees with accuracy of +0.1 degrees “Tilter C”

 Standard power kit

 High voltage warning display (X3)

 Bernas source assembly

 Standard Gas Box – includes 3 toxic and 1 inert

o External Argon (position #1)

o SDS BF3 gas card (JY Bottle) (position #2)

o SDS Arsenic gas card (JY Bottle) (position #3)

o SDS Phosphorus gas card (JY Bottle) (position #4)

 Gas Supply Assy, PFG (Xenon)

 Faraday Assy, Dose

 Dose Assembly (mechanical)

 Profiler Driver Assembly

 V810HP Control System Kit

 Platen Assembly: Composite I+, 300mm

 Plasma Flood Gun Kit

 KF-40 RGA Port

 Manometer Kit, 2 readouts

 300mm Loadlock Chamber Kit

 Diaphragm Vacuum Pump

 Triscoll Vacuum Pump

 PRI End-Station Robot

 Remote Service PC

 Dual Vaporizer Option: Indium

 300mm UHP N2 Option

 PRI 300mm Small WIP Buffer (4 FOUP door openers, E84 Compliant)

 Water-cooled CTI 9600 Cryogenic compressors (3 each) onboard stainless steel exhaust line

 Beam Energy Probe

 Pfeiffer Turbo Pump Kit: Source- one Pfeiffer TMH261; Loadlocks- two Pfeiffer TMH261 turbo pumps

 On-board Cryo Pump Upgrade

o Process Chamber: Four (4) CTI 250F High Capacity on-board cryo pumps

o Beamline: One (1) CTI 250F High Capacity on-board cryo pump

o Corrector Magnet: CTI 250F High Capacity on-board cryo pump

 Facilities input from bottom: Water, Air, N2, UHP N2

 Standard uncoated carbon beam liner shields (corrector magnet)

 Variable beam line aperture

 Scan Suppression feedback kit

 Wafer viewing monitor TV kit

 Rotating Mass Slit Assembly

 E-clamp Power Supply

 Graphite Air Bearing

 Remote Chiller

 Dose Controller (2 pass implant capability w/ PP+ upgrade)

 Vesda Smoke Alarm System, Model VLC-500 detector

 Additional details available upon request