AMAT Centura 11 5200 DPS

Centura II 5200 system

Mainframe

200mm notch

Phase II facilities

Narrow body load locks

HP+ Robot

Endpoint computer

Unknown length controller cables

Unknown length remote cables

SSS Co emulator Hard & Floppy drives

Gas Panel

UHP single line drop gas panel

Gas pallet for chamber B is missing

Remote equipment

60” Generator, AC, & controller racks

Pump interface cables unknown length

3 Steelhead heat exchangers

6 Edwards Q series pumps

Chamber A

DPS+ Metal chamber

Standard plunger throttle valve

EDTCU with Floating coil

MKS 649 backside controller

0.1 torr process manometer

10 torr service manometer

STP1303 turbo pump

GMW25 and OEM 12B RF generators

Chamber B -No chamber-

Chamber C

ASP + Strip chamber

AX2115 Microwave power supply

Chamber D

DPS+ Poly chamber

Standard plunger throttle valve

MKS 649 backside controller

STP2203 turbo pump

0.1 torr process manometer

10 torr service manometer

Atlas 2012 and AGC 6B RF generators

Chamber E

Single slot cooling chamber

Chamber F

200mm Orient chamber

Comments:

The system appears to be complete, however, it’s hard to tell for sure since some of the parts and cables are secured in boxes. The DPS chambers have obvious corrosion on the bellows and the DPS lower chamber channels that provide the necessary fluid for cooling have significant corrosion.