March Instruments PX1000E8 Plasma Asher / Etcher

March Instruments PX1000E8 Plasma Asher / Etcher

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Description

Batch system for plasma cleaning or etching.


Currently configured with one shelf set: 17 in. x 14 in. 


Shelves are mounted vertically from top to bottom. 


Not standard horizontal mounting.


Can accommodate multiple shelves.


RFX 600 13.56 MHz RF generator.


Two gas inputs.


Vacuum Pump not included, if required, please ask for the price

Specifications

ManufacturerMarch Instruments
ModelPX1000E8 Plasma Asher / Etcher
ConditionUsed
Stock NumberGOD23082023720223398