VSM Thermco 520 4 Stack Horizontal Diffusion Furnace
VSM Thermco 520 4 Stack Horizontal Diffusion Furnace
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Description
This is a used VSM 520 core, suitable for rebuild
The VSM furnace is a copy of a Thermco 5204.
The loaders are twin rail style, paddle clamps included.
This is a left hand system. (front door is included, hardware was loose, so door is sitting on the pallet)
This unit is capable of being controlled by ICCI or Semy, or TMX but controller is not included. Provisions for Semy remain
Includes the load station
furnace cabinet
source cabinet
round scavenger
480v 300a
Each tube level has a 41kva transformer and heating element.
Element bore, 10 inch maximum
150mm processing
Sold as is.
Specifications
Manufacturer | VSM |
Model | Thermco 520 4 Stack Horizontal Diffusion Furnace |
Condition | Used |
Stock Number | GOD23082023720223396 |
WAFER SIZE | 150mm |