VSM Thermco 520 4 Stack Horizontal Diffusion Furnace
VSM Thermco 520 4 Stack Horizontal Diffusion Furnace
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Description
This is a used VSM 520 core, suitable for rebuild
Left hand system
The VSM furnace is a copy of a Thermco 5204.
The loaders are twin rail style
This unit is capable of being controlled by ICCI or Semy, or TMX but controller is not included. Was set up for Semy Mypro II
Includes the load station 102 long, 94tall 38 wide
furnace cabinet 84 long, plus 12 inch scavenger, 94tall 29 wide, plus sensors on the rear upper
source cabinet 40 long, 106 tall with regulator box (not shown) 31 wide
round scavenger
480v 300a
Each tube level has a 41kva transformer and heating element.
Element bore, 10 inch maximum
150mm processing
Specifications
Manufacturer | VSM |
Model | Thermco 520 4 Stack Horizontal Diffusion Furnace |
Condition | Used |
Stock Number | GOD23082023720223396 |
WAFER SIZE | 150mm |