VSM Thermco 520 4 Stack Horizontal Diffusion Furnace

VSM Thermco 520 4 Stack Horizontal Diffusion Furnace

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Description

This is a used VSM 520 core, suitable for rebuild


Left hand system


The VSM furnace is a copy of a Thermco 5204. 

The loaders are twin rail style


This unit is capable of being controlled by ICCI or Semy, or TMX but controller is not included. Was set up for Semy Mypro II


Includes the load station 102 long, 94tall 38 wide

furnace cabinet 84 long, plus 12 inch scavenger, 94tall 29 wide, plus sensors on the rear upper

source cabinet 40 long, 106 tall with regulator box (not shown) 31 wide


round scavenger


480v 300a 


Each tube level has a 41kva transformer and heating element.


Element bore, 10 inch maximum


150mm processing


Specifications

ManufacturerVSM
ModelThermco 520 4 Stack Horizontal Diffusion Furnace
ConditionUsed
Stock NumberGOD23082023720223396
WAFER SIZE150mm