Lam Research TCP 9600 SE Etcher
Lam Research TCP 9600 SE Etcher
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Description
Condition: fully refurbished to OEM Specs.
1. Model : TCP9600SE with DSQ & APM
2. System Serial Number :
3. Operator Interface : bulkhead
4. Software : Envision
5. Transportation Wafer Size : 200mm Wafers ( 8” )
6. Indexer : Hine 38A
7. Load station: Belt type Shuttle, Standard Edge Detector & Load lifter
8. C/B Hardware Configuration
8.1 Middle Chamber: 6cm Fixed Gap(715-331131-002)
8.2 Plate Top Ceramic : 716-330122-003
8.3 Wafer Clamping : ESC (Notch)
9. RF Generator
1) TCP : RFG1250
2) Bias : RFG1250
3) DSQ : RFG1250
10. Chamber Manometer : Main Manometer ,3Torr Manometer & Reference Manometer
11. TCP Matcher : 853-032190-008,
12. Bias Matcher : 853-330951-021
13. Turbo Pump : Alcatel ATH-1300M
14. Pressure Controller
14.1 Main : Vat Valve(64PM) & PM5
14.2 DSQ : MDVX-018 & AC-2
15. Hinged DSQ
16. DSQ Matcher
17. Heated Paddle
18. WVDS : Manual fill
19. Chamber heater Controller: 12 Loop External Anafaze
20. Orbitally welded Gas Box: Total 8 Gases
21. Closed Loop He Cooling: UPC8130 & Tylan CDL-12S13(20 Torr)
22. Remote Power Module: Main 175A Remote Power Module
Fully refurbished to OEM specs
Specifications
Manufacturer | Lam Research |
Model | TCP 9600 SE Etcher |
Condition | Refurbished |
Stock Number | BM4135 |