2001 LAM Rainbow 4420 Etcher

2001 LAM Rainbow 4420 Etcher

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Description

Configuration: 

- Cassette to Cassette Single Wafer Etcher

- ESC

- Classic

- Particle reduction

- Orbital gas panel

- TCU 2080 Chiller

Specifications

ManufacturerLAM
ModelRainbow 4420 Etcher
Year2001
ConditionUsed
Stock NumberGOD23082023720223393
WAFER SIZE150mm