2001 LAM Rainbow 4420 Etcher
2001 LAM Rainbow 4420 Etcher
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Description
Configuration:
- Cassette to Cassette Single Wafer Etcher
- ESC
- Classic
- Particle reduction
- Orbital gas panel
- TCU 2080 Chiller
Specifications
Manufacturer | LAM |
Model | Rainbow 4420 Etcher |
Year | 2001 |
Condition | Used |
Stock Number | GOD23082023720223393 |
WAFER SIZE | 150mm |