SEN NV-GSDIII-LE

End station 110 x 94 x 98

Analyzer, Power rack 76 x 54 x 98

Source teminal 50 x 80 x 88

Pallet-1: Disk flow switch panel, Misc parts etc 77 x 45 x 22

Pallet-2: Main water panel, Hood, Misc parts etc 81 x 45 x 38

Pallet-3: Teminal / Side panel, Misc parts etc 86 x 50 x 20

Pallet-4: Stack, Utility rack, Misc parts etc 73 x 48 x 40

Pallet-5: Controller, Cover, Misc parts etc 45 x 50 x 39

Pallet-6: Power supply, Accessories, Misc parts etc 51 x 46 x 45

Pallet-7: Gas box 41 x 49 x 60

Utility rack 84 x 26 x 59

Compressor, Helium hose 32 x 28 x 40

Power box 18 x 20 x 30

Chiller 31 x 28 x 76

Transformer 28 x 29 x 43

PC, Monitor rack 32 x 28 x 49

SMIF1 17 x 24 x 75

SMIF2 17 x 24 x 75

SMIF3 17 x 24 x 75

Bottom plate

PROCESS: HIGH CURRENT

MOVING TYPE: DISK TYPE

DRY PUMP : N/A

CRYO PUMP :CTI 10 CRYO , CTI

COMPRESSOR : SUZUKI SHOKAN

TMP (TURBO PUMP) : N/A

CHILLER : RWA-012J-BE07CBD