KLA-Tencor Auto RS-55tc Resistivity Test Tool

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Description

  • Accommodates all Wafer Sizes from 50mm – 200mm
  • 5 Megaohm/sq Measurement Range
  • Typical Measurement Time: 5 – 4.5 Seconds per Test Site
  • <0.2% (1 sigma) Measurement Repeatability
  • Thermal Chuck Temperature Measurement Accuracy: ±0.5ºC
  • PC Based System Controller
  • 25 MHz 486 Based MPU
  • 44 MB Removable Hard Disk
  • 110 MB Fixed Hard Disk Drive
  • 5” Floppy Disk Drive
  • X-Y Map: Up to 1200 Sites Programmable
  • Probe Qualification: 20 sites
  • 1 - 30 Programmable Routine Test Sites (ASTM Standard Tests Included)


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Specifications

ManufacturerKLA-Tencor
ModelAuto RS-55tc Resistivity Test Tool
ConditionUsed
Stock NumberGOD23082023720223384