Gasonics AS2000 Spare Parts by Tarasemi

Please check the list below and contact us with your parts request.







GASONICS


OEM
TOOL TYPE
# of Units
TARA PART #
PART NAME
Part Number


GASONICS
A2000
3
300075
VAC ARM PCB



GASONICS
A2000
3
300076
PCA,LOADLOCK,INTERFACE BD
90-2608


GASONICS
A2000
1
300077
CONTROLLER BOARD
90-2658


GASONICS
A2000
4
300079
PLASMA LAMP FAILURE DETECTION
A90-031-03


GASONICS
A2000
4
300080
DUAL SETPOINT SCR CONTROLLER
90-2736


GASONICS
A2000
1
300081
DISPLAY DECODER
90-2609


GASONICS
A2000
5
300083
ARM CONTROLLER BOARD
06764-802


GASONICS
A2000
4
300084
48V CONTROL BOARD
810-2140-005A


GASONICS
A2000
7
300089
CHAMBERS
AO1-132-01


GASONICS
A2000
3
300093
POWER GAUGE