August NSX-90
August NSX-90
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Description
Configuration:
August NSX-90 is a macro defect inspection tool solution used through out the device manufacturing process. Macro defects (defects 5 micron and larger) can take place during wafer manufacturing, probing, bumping, dicing, or by general handling, and can have a major impact on the quality of a microelectronic device. The NSX-90 quickly and accurately detects yield-inhibiting defects, providing quality assurance and valuable process information.
Original equipment specs are as follows:
Camera and Optics:
Review camera CCD : 3CCD Color
Review camera Resolution : 752pixels*582 lines
Second Camera CCD (Option): B/W Digitial
Second camera Resolution : 1008pixels*1018 lines
Objectives: 1.25X to 20X(Automated inspection )
Magnification at Review Monitor: 50X to 2000X
Magnification for Second Camera at Monitor: 50X to 3000X(Depending on the photo eyepiece lens)
Second Camera PE lenses:3.3x
- Throughput:
- 8”: ? 6.5 WPH
- 6”: ? 8.2 WPH
This unit is configured with Wafer handler for 8" wafers.
August NSX-90 is a macro defect inspection tool solution used through out the device manufacturing process. Macro defects (defects 5 micron and larger) can take place during wafer manufacturing, probing, bumping, dicing, or by general handling, and can have a major impact on the quality of a microelectronic device. The NSX-90 quickly and accurately detects yield-inhibiting defects, providing quality assurance and valuable process information.
Original equipment specs are as follows:
Camera and Optics:
Review camera CCD : 3CCD Color
Review camera Resolution : 752pixels*582 lines
Second Camera CCD (Option): B/W Digitial
Second camera Resolution : 1008pixels*1018 lines
Objectives: 1.25X to 20X(Automated inspection )
Magnification at Review Monitor: 50X to 2000X
Magnification for Second Camera at Monitor: 50X to 3000X(Depending on the photo eyepiece lens)
Second Camera PE lenses:3.3x
- Throughput:
- 8”: ? 6.5 WPH
- 6”: ? 8.2 WPH
This unit is configured with Wafer handler for 8" wafers.
Specifications
| Manufacturer | August |
| Model | NSX-90 |
| Condition | Used |
| Stock Number | OD12220 |