KLA Tencor Flexus 2908
KLA Tencor Flexus 2908
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Description
KLA Tencor Flexus 2908
Wafer size: 125mm-200mm
Temperatures up to 900C
Dual wavelength technology
MS Windows based software
Power: 230v, 50/60hz
Tool primarily used for calculation of biaxial modulus of elasticity
and linear expansion, water diffusion coefficient in dielectric films,
linear regression and stress-temp or stress-time gradients.
Wafer size: 125mm-200mm
Temperatures up to 900C
Dual wavelength technology
MS Windows based software
Power: 230v, 50/60hz
Tool primarily used for calculation of biaxial modulus of elasticity
and linear expansion, water diffusion coefficient in dielectric films,
linear regression and stress-temp or stress-time gradients.
Specifications
| Manufacturer | KLA Tencor |
| Model | Flexus 2908 |
| Condition | Used |
| Stock Number | GOD130220202908 |
| Wafer Size | 125-200mm |