IPEC 676 Automated CMP Tool

IPEC 676 Automated CMP Tool
Standard Features Include:
- Four wafer planarizers
- Three cassette tilter load/unload station
- Advanced pad motion control
- High speed polish drive (0-600 RPM)
- Closed loop delta P control
- Endpoint detection system
- Stainless steel polish bell
- Dual pad conditioning systems
- Upgraded 500MHz Pentium
Facilities - Dimensions:
Width: 82” Depth: 69” Height: 102”
- Electrical, 120/208 VAC WYE 3 Phase, 60 Hz, 60 Amps Max.
- DI Water: 50psi / 5gpm