AMAT AKT 1600 PECVD
AMAT AKT 1600 PECVD
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Description
Tool Model : AMAT 1600 PECVD
• Vintage 2005
• Process: PECVD iN,SiO2, i-a-Si,
SiON and N+ a-Si
• SoFware Version: AKT7.3
• System Power RaNng: 208 VAC 3-
Phase
• Flat panel size: 320 x 352 mm
• (5) Process chambers:
• Film Capability SiN
• SiO2
• i-a-Si
• SiON
• N+ a-Si (Remote Plasma
Clean)
Includes:
• Chillers
Specifications
| Manufacturer | AMAT |
| Model | AKT 1600 |
| Year | 2005 |
| Condition | Used |
| Stock Number | OD41219-3 |
| Wafer Size | 320mm x352mm |