MRL Industries bandit 218
MRL Industries bandit 218
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Description
200mm LPCVD furnace
tube 1: TEOS/anneal
tube 2:Nitride/poly, gas connections: air low N2, N2, FG1, Ar, O2, SiH2Cl2(DCS), SiH4, NH3
2 Kashiyama vacuum pumps with blowers
Schumacher M-Dot dopant source controller
furnace dims: 66x36x78
gas module dims: 18x36x78
power req: 480v, 250amps max
complete specifications upon request
Specifications
Manufacturer | MRL Industries |
Model | bandit 218 |
Condition | Used |
Stock Number | GOD23082023720223336 |