Applied Materials Centura PVD

Working Condition

2 sets,  one still in clean room



Second tool

* Warehouse storage (see photo)
* Parts some missing (See Inspection DATA)





1. Main Frame PVD 200mm
 
 
 
 
 



2. Process Chamber TiN
 
 
 
 
 
?
2


3. Orient Degas Chamber
 
 
 
 
 
?
1


4. Fast Cool Down Chamber
 
 
 
 
 
?
1


5. Generator Rack-1
 
 
 
 
 
?
1


6. Remote AC Rack
 
 
 
 
0190-76118
?
1


Missing Parts List


1. Neslab Chiller
 
 
 
 
0190-76118
Missing
1


2. Cool Chamber Upper
 
 
 
 
 
Missing
1


3. PVD DC Power Supply 3KV
 
 
 
 
0190-01893
Missing
1


4. Heater Driver
 
 
 
 
 
Missing
2


5. SBC BD
 
 
 
 
 
Missing
1


6. Ion Gauge BD
 
 
 
 
 
Missing
2


7. FDD
 
 
 
 
 
Missing
1


8. DI/O BD
 
 
 
 
 
Missing
1


9. AI/O BD
 
 
 
 
 
Missing
1


10. Robot Indexer Cable
 
 
 
 
 
Missing
1


11. CRT
 
 
 
 
 
Missing
2


12. ESC Chuck Assy Ch#A,B
 
 
 
 
 
Missing
2


13. Heater Lift Motor
 
 
 
 
 
Missing
2


14. Matcher
 
 
 
 
 
Missing
2


15. Compressor
 
 
 
 
3620-01389
Missing
2


16. Signal Cable
 
 
 
 
 
Missing
 


1) Remote Rack to Ch#A Pump RJ13 - 50ft
 
 
 
 
0150-20678
Missing
1


2) Remote Rack to Ch#B Pump RJ14 - 50ft
 
 
 
 
0150-20678
Missing
1


3) Remote Rack to Buffer Pump RJ11 - 50ft
 
 
 
 
0150-20678
Missing
1


4) Remote Rack to LL Pump RJ12 - 50ft
 
 
 
 
0150-20678
Missing
1