Ontrak DSS200 Series II CE Wafer Scrubber

Includes: Complete Frame teardown and rebuild of tool including but not limited to all new Brush-Box parts,
bearings, shafts, seals, couplings, and belts. Remanufactured spindle shaft, new pulleys, belts, and spin nest. New
Robot and cassette belts, bearings, and couplings. DC motors to be replaced.

Configuration
• 200mm (8-inch), Silicon wafers
• 110V, Single Phase, 60 HZ
• Tinted Spin Hood
• Standard Robot orientation
• Upgraded Plastic Roller Arms
• Solid State Hard Drive
• 2.3.7 Software, Y2K Compliant or newer
• Configured for Customer specific cassettes (Please provide model # and/or samples)
• Three color Light tower
• SECS-GEM
• Dual Chemical inputs, one per station.
• Interlocked Brush Lid
• Leak detector in Tool floor