Novellus C3 Vector Express AHM PECVD
Novellus C3 Vector Express AHM PECVD
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Description
No HDD
In storage
1 Chamber
Advanced Ashable Hard Mask process ( AHM )
"Designed to address the challenges in advanced technology nodes that utilize 193nm lithography for high aspect patterning etch, where thinning photo-resist material makes it difficult to extend conventional patterning, AHM on VECTOR Express represents a major technical breakthrough compared to conventional amorphous carbon film processing"
Specifications
Manufacturer | Novellus |
Model | C3 Vector Express |
Year | 2007 |
Condition | Used |
Stock Number | GOD21062022 |
Wafer Size | 300mm |