Novellus C3 Vector Express AHM PECVD

Novellus C3 Vector Express AHM PECVD

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Description

No HDD


In storage


1 Chamber


Advanced Ashable Hard Mask process ( AHM )


"Designed to address the challenges in advanced technology nodes that utilize 193nm lithography for high aspect patterning etch, where thinning photo-resist material makes it difficult to extend conventional patterning, AHM on VECTOR Express represents a major technical breakthrough compared to conventional amorphous carbon film processing"

Specifications

ManufacturerNovellus
ModelC3 Vector Express
Year2007
ConditionUsed
Stock NumberGOD21062022
Wafer Size300mm