AMAT Complus 4T Inspection darkfield Inspection system
AMAT Complus 4T Inspection darkfield Inspection system
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Description
SW Ver:V10.6(516)
Load port: TDK
Robot Type:Yaskawa
Laser working Hours:87918 hrs
Laser Roll Over: 3.27 W
Load port: TDK
Robot Type:Yaskawa
Laser working Hours:87918 hrs
Laser Roll Over: 3.27 W
Specifications
| Manufacturer | AMAT |
| Year | 2007 |
| Condition | Used |
| Stock Number | OD8319 |
| Wafer Size | 300mm |