Nissin Exceed 2000 Medium Current Ion Implanter 75-100mm

Nissin Exceed 2000 Medium Current Ion Implanter 75-100mm

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Description

Nissin Exceed 2000 Ion Implanter
System Dimensions: 3000W X 6325D X 2500H cm
Wafer Size: 75-100mm
Energy Range 10-200KV
Wafer Size 3inch(76mm) / 4inch(100mm)
Process # E95-3005
Energy Range 10-200KV
Cassette Stages 4
Loadlock 2 LEFT and RIGHT
Orienters 2 (Auto-Flat/Notch Find)
Software Main:OS Dos / Process: Windows XP Japanese

Download the spec sheet attached for further information

Specifications

ManufacturerNissin
ModelExceed 2000
Year1997
ConditionUsed
Stock NumberGOD14022019-005
Wafer Size75-100mm