Nissin Exceed 2000 Medium Current Ion Implanter 75-100mm
Nissin Exceed 2000 Medium Current Ion Implanter 75-100mm
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Description
Nissin Exceed 2000 Ion Implanter
System Dimensions: 3000W X 6325D X 2500H cm
Wafer Size: 75-100mm
Energy Range 10-200KV
Wafer Size 3inch(76mm) / 4inch(100mm)
Process # E95-3005
Energy Range 10-200KV
Cassette Stages 4
Loadlock 2 LEFT and RIGHT
Orienters 2 (Auto-Flat/Notch Find)
Software Main:OS Dos / Process: Windows XP Japanese
Download the spec sheet attached for further information
Specifications
Manufacturer | Nissin |
Model | Exceed 2000 |
Year | 1997 |
Condition | Used |
Stock Number | GOD14022019-005 |
Wafer Size | 75-100mm |