TEL U2e-655II upgraded to U2e-855II Oxide Etcher

TEL U2e-655II upgraded to U2e-855II Oxide Etcher


For sale is a TEL U2e-655II upgraded to U2e-855II Oxide Etcher. It is located in Asia. Please check below for the configuration.

Configuration:




1) MFC(MASS FLOW CONTROLLER)





GAS NO.
GAS MAME
MFC SIZE(SCCM)
MAKER
MODEL



GAS #1
C4F8
50
SAM
SFC-1480F



GAS #2
Ar
1000
SAM
SFC-1480F



GAS #3
O2
20
SAM
SFC-1480F



GAS #4
CHF3
100
SAM
SFC-1480F



GAS #5
O2
100
SAM
SFC-1480F



GAS #6
CF4
100
SAM
SFC-1480F



GAS #7
N2
100
AERA
FC-780XC



GAS #8
CF4 ( 0.419 )
5
AERA
FC-780XC










 







2) AC-2 Controller (MAIN PRESSURE CONTROLLER)
APC(Auto Pressure Controller)



ITEMS
Maker
MODEL
Attachment
REMARK


 
APC
VAT
61146-PH52-ABM1
OK




VAT
61146-PH52-ABM1
OK











3) Gauge
GAUGE







Unit
Maker
Model
Range
REMARK



Baratron
MILLIPORE
CDLD-01S12E
1 PA/133.32
PC1


 
Baratron
MILLIPORE
CDLD-01S12E
1 PA/133.32
PC2



Baratron
MKS
622A01 TDE
1 PA/133.32
TC










4) Load station hardware configuration
SYSTEM






 
Description
Maker
Model
REMARK


 
1.TMP
MITSBISHI
FT-1200W



 
MITSBISHI
FT-1200W




2.TMP Controller
MITSBISHI
FT-1200W




MITSBISHI
FT-1200W




3. ROBOT
YASKAWA
VS2C




4.Robot Controller
YASKAWA
SRC-?017




5. EPD
TEL
SE-2000




6. UPS






7.Generator
PEAL
RP-3000-27M
PC1 TOP



PEAL
LP-2000-800K
PC1 BOT



PEAL
RP-3000-27M
PC2 TOP



PEAL
LP-2000-800K
PC2 BOT



8.Matcher
PEAL
M-30AW2VD-27M
PC1 TOP


 
PEAL
M-20A2LS-U2-4
PC1 BOT



PEAL
M-30AW2VD-27M
PC2 TOP


 
PEAL
M-20A2LS-U2-4
PC2 BOT


 







6)  Function Check
SUB MODULE






UNIT
MAKER
MODEL
JUDGE
REMARK


 
1.Dry Pump
EDWARD
IGX-100L
OK
CC


 
EDWARD
IL-600
OK
TC


 
EDWARD
IH-80
OK
PC1


 
EDWARD
IH-80
OK
PC2



2.Chiller
SMC
INR-341-42B1-X134
OK
PC1



SMC
INR-341-42B-X1134
OK
PC2