TEGAL 901E RIE
TEGAL 901E RIE
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Description
Tegal 901e RIE was decommissioned in July 2018, super nice condition. 1986 vintage, and it can support two process gases. It is used primarily for O2 RIE.
Specifications
| Manufacturer | Tegal |
| Model | 901e |
| Year | 1986 |
| Condition | Used |
| Stock Number | OD2982018 |