MRC 903 Sputtering System
MRC 903 Sputtering System
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Description
This Tool will be sold rebuilt with new PLC
It has a Siemens PLC installed.
Has 2 CHI inset magnetrons and etch.
AE MDX-10 DC PS, MKS guaging system,
CTI OB-8 cryo pump with 8200 compressor & OB controller,
new hydraulic system.
It has a Siemens PLC installed.
Has 2 CHI inset magnetrons and etch.
AE MDX-10 DC PS, MKS guaging system,
CTI OB-8 cryo pump with 8200 compressor & OB controller,
new hydraulic system.
Specifications
| Manufacturer | MRC |
| Model | 903.0 |
| Condition | Used |
| Stock Number | OD288182 |