Asyst RLS 150/A Reticle stocker
Asyst RLS 150/A Reticle stocker
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Description
Tooltyp
RLS 150/A
Vendor:
Asyst
Serial number
1295xxx
description
1428 Slots, Barcode Reader, Particulate Monitor System
RLS 150/A
Vendor:
Asyst
Serial number
1295xxx
description
1428 Slots, Barcode Reader, Particulate Monitor System
Specifications
| Manufacturer | Asyst |
| Model | RLS 150/A |
| Year | 1995 |
| Condition | Used |
| Stock Number | OD4818 |
| Wafer Size | 150 reticle |