Asyst RLS 150/A Reticle stocker

Asyst RLS 150/A Reticle stocker

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Description

Tooltyp
RLS 150/A


Vendor:
Asyst


Serial number
1295xxx


description
1428 Slots, Barcode Reader, Particulate Monitor System

Specifications

ManufacturerAsyst
ModelRLS 150/A
Year1995
ConditionUsed
Stock NumberOD4818
Wafer Size150 reticle