Asyst RLS 150/A Reticle stocker
Asyst RLS 150/A Reticle stocker
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Description
Tooltyp
RLS 150/A
Vendor:
Asyst
Serial number
1295xxx
description
1428 Slots, Barcode Reader, Particulate Monitor System
RLS 150/A
Vendor:
Asyst
Serial number
1295xxx
description
1428 Slots, Barcode Reader, Particulate Monitor System
Specifications
Manufacturer | Asyst |
Model | RLS 150/A |
Year | 1995 |
Condition | Used |
Stock Number | OD4818 |
Wafer Size | 150 reticle |