1997 DNS SS-W80A-AR

1997 DNS SS-W80A-AR

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Description

DNS_SS-W80A-AR

OEM : DNS

 

MODEL : SS-W80A-AR

 

SERIAL NO. : 56700-2228

 

VINTAGE : MAR.1997

 

WAFER SIZE: 8 INCH

 

PROGRESS TYPE: WET/ CMP

 

COMPONENT :

 

MAINFRAME

 

CHEMICAL CABINET

 

LOAD PORT

 

NEC FC-9821X PC

 

SUPER VEXTA UDX5107 5-PHASE DRIVER

 

PS-500 UPS INSTALLED

 

YASKAWA CESA SERIES SERVO CONTROLLER

 

EBARA PJ-100 CHEMICAL PUMP

 

Dimension

MAIN FRAME 60×60×80

LOAD PORT 62×32×72

CHEMICAL CABINET 45×30×75

PALLET-1: MISC. PARTS 45×54×25




 

Specifications

ManufacturerDNS
ModelSS-W80A-AR
Year1997
ConditionUsed
Stock NumberGOD180720242D3
WAFER SIZE200mm