DNS WS-820L Automated wafer cleaning system

DNS WS-820L Automated wafer cleaning system
2011

4 robots
Condition:
Complete like new working condition, only used during acceptance, no production.  No de-installed and in storage.

Click below link for video:
Video of DNS 820L running 100 Wafers with DNS Engineer

Configuration:


Automated Alpha Tool (Double Sided Porous Silicon: 25 wafer batch) based on WS-820L platform retrofittable to 50 wafer batch double sided

Wafer size 200mm
Wafer Flow Left to right
Cassette included


Components to include:

Main body – 1 unit
Loader – 1 unit
Unloader – 1 unit
Two robots for bath to bath transfer systems – one robot for wet wafers and one for dry wafers;



Robot arms to be Teflon coated quartz - 2 units

Double Sided Porous Silicon bath – 1 unit
Electrical Breaker Box for U.S. safety regulation
CD ROM Manuals
Material is FM-PVC to meet FM4910 criteria


System description:

Position 1 : Loader (CTC type)
Position 2 : CHCL (Robot Chuck Clean)
Position 3 : PS (Single-Double Sided Porous Silicon bath)
Position 4 : QDR (Quick Dump Rinse)
Position 5 : SD (Spin Dryer)
Position 6 : Unloader (CTC type)


Other components:

Notch Aligner
Wafer Counter
Fire extinguisher system for PS bath
HF49% replenishment function for PS bath
IPA replenishment function for PS bath(w/ anti explosion)