Beta Squared Model OS2000 Micralign Mask Scanner (non contact)

Beta Squared Model OS2000 Micralign Mask Scanner (non contact)

Projection Mask Scanner, Lithography

Upgraded to non contact



This tool started life as a 100 mm (4” tool) and remains as such, though it was customized to be able to also run 2” wafers that were carried on 100 mm carriers. This customization included the machine control system, OS2000.

To be more specific on the type of Mask Aligner, it is a Projection Mask Aligner as contrasted to a Proximity/Contact Aligner. Because of this it has both better alignment specs, depth of focus, and overlay specs. It allows adjustments for mag in either direction independently as well as adjustments to minimize astigmatism and other distortions. And also because of this, it is generally more expensive than a Proximity/Contact Aligner because it was meant for a production environment. We refurbished and customized this tool for LED manufacturing back in 2011 and then they shut down. Tool didn’t run hardly at all after the refurbishment on this tool. It should be in “like new” condition!

If the buyer needs it to be installed in their fab, we can support with an extra cost for install and warranty.



[av_