Okamoto Grind-X GNX-300P Grinder

Okamoto Grind-X GNX-300P Grinder
(Vintage : 2001, condition : No Missing, but No polisher)

This unit is located in Asia and is stored in Warehouse.
This unit was in working condition before de-install.

Configuration:

Wafer diameter: 8" and 12"

Grinding mode: Continuous down feed

Grinding spindle: 2 axes

Rotation speed: 3,000 rpm maximum

Bearing: air bearing

Motor: 5.5 kW built-in motor

Cooling method: water-cooled

Maximum vertical stroke: 4"

Vertical fast-grind speed: 8" per minute

Grinding speed: 1 to 999 um per minute

Grinder diameter: 12"

Grinding resistance reading: monitoring current, output to CRT

Horizontal angle adjustment: manual

Maximum radial load capacity: 30 kgf

Maximum axial load capacity: 150 kgf

Air consumption: 20 L per minute x 2

Index table:

Number of vacuum chucks: (3)

Vacuum chuck material: porous ceramic

Vacuum chuck rotation motor: 1.0 kW AC servo motor x 3

Vacuum chuck rotation speed: 400 rpm maximum

Chuck bearing: air bearing

Maximum radial load capacity: 30 kgf

Maximum axial load capacity: 150 kgf

Air consumption: 36 L per minute x 3

Auto measuring device:

Wafer thickness measurement method: Two-point in-process gauge

Wafer thickness setting method: final

Wafer thickness displaying range: 1.8 mm

Table cleaning unit:

Cleaning method: water and ceramic ring

Wafer cleaning unit:

Cleaning method: water and brush

Operation panel:

Display method: 15" TFT color touch panel

Power supply:

Input power: 200V +/- 10%, 3 phase, 50 / 60 Hz

Power consumption: 20 kVA

Grounding: ground resistance JIS type 3 100 ohms or lower

Air supply:

Consumption: 160 NL per minute

Pressure: 0.49 to 0.78 MPa

Dew point: -15°C or lower

Oil removal rate: 0.1 PPM W / W

Grinding water

Water used: DI water

Pressure: 0.34 to 0.49 MPa

Flow rate: 10 L per wafer

Cooling water for vacuum pumps and spindles:

Water used: city water

Pressure: 0.19 to 0.49 MPa

Flow rate: 10 NL per minute

Mist separator duct / general exhaust: Exhaust rate:

2 m^3 per minute

Connection: duct hose, 4" outer diameter

Vacuum pump duct / general exhaust:

Exhaust rate: 75/90 m^3 / h, 50 / 60 Hz

Connection: duct hose, 4" outer diameter



[av_contact email='gerard@tarasemi.com' title='Request a Formal Quote' button='Send' on_send='' sent='Your message has been sent!' link='manually,http://' subject='' autorespond='' captcha='' color='']
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