Ulvac Entron W-200T6 PVD Sputtering Tool

2006 tool. Ulvac PVD/CVD. Can be reconfigured to 6 PVD chambers.

Entron W-200T6 System (1E3T2H) – Full Acceptance
1 x Chemical Dry Pre-Clean Chamber
1 x Anneal Chamber for Chemical Dry Pre-Clean Chamber
1 x Anneal Chamber for Post Anneal
1 x PVD-Ni (Ring-Ni) Chamber
1 x PVD-TiN (Normal) and 1 x PVD Co (Normal) Chambers
Quotation also includes:
Open Cassette Buffer Station
2 Sets of Spare Shields per Chamber
Host Communications (SECS/GEM); S2 Safety
Customer Supplied Items:
Normal TiN Target
Normal Co Target
Normal Ni Target and backing plate (should customer want
to run Normal Ni)
Dry Pumps
Gas Scrubber