Nikon S202+ Scanner
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Description
- Res 250 nm
- NA 0.60
- KrF excimer laser (248 wavelength) Exposure light source
- Field 25 x33 mm exposure
- Ratio 1:4
- Alignment accutacy (EGA, I M I + 3s ) ? 45 nm
- NA 0.60
- KrF excimer laser (248 wavelength) Exposure light source
- Field 25 x33 mm exposure
- Ratio 1:4
- Alignment accutacy (EGA, I M I + 3s ) ? 45 nm
Specifications
| Manufacturer | Nikon |
| Model | S202+ |
| Year | 2003 |
| Condition | Used |
| Stock Number | OD225172 |