AMAT eMax CT chamber

AMAT eMax CT chamber

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Description

Manufacturer
Applied Materials


Model
AMAT eMax CT chamber


Wafer Size Range






  Set Size
300 mm


Number of Chambers
1


Process Capabilities
Oxide Etch


Chamber 1 Description
AMAT eMax CT chamber
dielectric etch chamber
Manufactured in 2007


Year of Manufacture
2007


Condition
Very Good

Specifications

ManufacturerAMAT
ModeleMax CT Chamber
Year2007
ConditionUsed
Stock NumberOD282172