Hitachi Spare Parts

Hitachi Spare Parts






OEM
TOOL TYPE
TOTAL COUNT
PART NAME
PART NUMBER ON ITEM


HITACHI
CD-SEM S-8820
7
TURBOTRONIK NT10
FAB NO 85701 / Z9700155


HITACHI
CD-SEM S-8820
6
TURBOTRONIK NT 340 M



HITACHI
CD-SEM S-8820
8
CAMERA ASSEMBLY (SONY)
113680


HITACHI
CD-SEM S-8820
7
STACK TURBO PUMP



HITACHI
CD-SEM S-8820
7
LOAD LOCK TURBO PUMP



HITACHI
CD-SEM S-8820
4
HARD DRIVE UNIT
343976    hd-bignl


HITACHI
CD-SEM S-8820
6
ETCH PROCESS PUMP
D37209100


HITACHI
308
6
MASS FLOW SYSTEM
1001354


HITACHI
308
4
RF POWER GENERATOR



HITACHI
308
4
TUNER CONTROLLER



HITACHI
308
2
ETCHING CHAMBER TEMP CONTROLLER



HITACHI
308
2
BUFFER CHAMBER TEMP CONTROLLER



HITACHI
308
1
LCD1012X



HITACHI
308
1
TOUCH SCREEN  MONITOR



HITACHI
308
1
TOUCH DATA CONTROLLER



HITACHI

1
BELLOWS
3REA043343


HITACHI

2
CKD 1/2 SOLENOID VALVE
3ROT004194


HITACHI

2
CLAMP,T-80
3ROT002834


HITACHI

2
UNIBODY TORCH
3HOT023559


HITACHI

2
B32 DX COMPUTER
PC-SD40


HITACHI
CD-SEM
1
LAZER POWER SUPPLY
2111A-20SLAT / 8462


HITACHI
CD-SEM
1
STACK TURBO PUMP
?


HITACHI
CD-SEM
1
STAGE LAZER
1738129


HITACHI
CD-SEM
1
TURBOTRONIC NT10
857-01


HITACHI
CD-SEM
1
3 AXIS ROBOT
323703


HITACHI
CD-SEM
1
CAMARA MODULE
6712-2000/0000


HITACHI
CD-SEM
2
DIGITAL DATA STORAGE
19308111-01


HITACHI
CD-SEM
7
ROBOT
00-8163


HITACHI
CD-SEM
1
ROBOT ARM
NM4050


HITACHI
CD-SEM
1
CAMARA DRIVE TRK2/3
8943AL139/1709/9


HITACHI

10
PC
AN09SA8570


HITACHI

1
MEC CONTROLLER
31390-002


HITACHI

1
SPIKE TC OVERHEAT DETEC
5TOT052980


HITACHI

1
COGNEX BOARD
203-0026


HITACHI

1
BAFFLE
7400-0136-01B


HITACHI

1
VACUUM PIPE
4QOD179653


HITACHI

1
DIGI CAT COMBUSTIBLE GAS TRANSMITTER
2414-0020


HITACHI

9
PCB
DISI-2


HITACHI

1
PCB
PTPI-I


HITACHI

8
PCB
SBCO9-2


HITACHI

14
PCB
D024-2


HITACHI

8
PCB
MM96-2


HITACHI

8
PCB
LANI-4


HITACHI

1
RF POWER GENERATOR



HITACHI

1
BUFFER CHAMBER TMP CONTROLLER



HITACHI

3
TOUCH DATA MONITOR
BE6138A2


HITACHI

1
VIDEO MONITOR
VM-920-S2


HITACHI

1
DUAL CASSETTE HANDLER CARD
249181


HITACHI

1
ECPU263
271-2863


HITACHI

1
SG/VA
568-5510


HITACHI

1
MEM
568-5502


HITACHI

1
PSDISP
568-5559


HITACHI

1
SEMPANEL/CONTROL PANEL
568-5556


HITACHI

1
OPTAFC
568-5544


HITACHI

1
SIGNAL TOWER INTERFACE CARD
238781


HITACHI

1
STSENSE
569-5505


HITACHI

2
PWB ASSY
248411


HITACHI

1
VME/OVERLAY INTERFACE
8946-0001


HITACHI

1
DUAL CASSETTE HANDLER BOARD
249141


HITACHI

1
UNICASSETTE SYSTEM INTERCONNECT BOARD
250261


HITACHI

2
ETCHING CHAMBER TMP CONTROLLER



HITACHI

3
M.W. GENERATOR
PH1117A


Hitachi
Etch
1
Rf Generator
CF-500-400k


Hitachi
Etch
1
Tuner Controller
ZDK-916L2C-P


Hitachi
Etch
1
EC Mag P/G
ES7


Hitachi
Etch
1
Upper Coil Power Supply
KDS-30350


HITACHI

1
TRANSFER ROBOT
M-712E


HITACHI

1
SUSCEPTOR
2-829527-03


HITACHI

1
BUTTERFLY VALVE UNIT
21251-10032-001


HITACHI

3
ELECTRICAL UNIT
20020-38107


HITACHI

1
MAINFRAME/VAC PUMP
691-HD02


HITACHI

1
HP QUATPUMP
G1311A


HITACHI

1
HP LASERJET
4200


HITACHI

1
AGILENT 110 SERIES
G1316A


HITACHI

1
NOISE FILTER
3SUP-H100H-ER-4


HITACHI

3
TDK NOISE FILTER
ZACT2280-ME


HITACHI

1
OKAYA NOISE FILTER
3SUP-H100H-3R-4


HITACHI

1
COSEL POWER SUPPLY
P50E-24


HITACHI

1
HEATER TRANSFER UNIT
99602901


HITACHI

1
POWER UNIT
99603001


HITACHI

1
DC P4-S UNIT
NO NUMBER


HITACHI

1
LCD CONTROL SCREEN
NO NUMBER


HITACHI

1
PLC CABINET
NO NUMBER


HITACHI

1
PLASMA GENERATOR
SMA-20B


HITACHI

1
MYDAX CHILLER
IVL5WB


HITACHI

1
CONSOLE
PLY CONSOLE


HITACHI

1
POWER GENERATOR UNIT
PLY 401


HITACHI

1
STP CONTROL UNIT
SCU-301


HITACHI

1
BUEHLER CONTROLLER
ECOMET 3


HITACHI

2
ELECTRONIC WATER PUMP
RFDS 2000-2V