APPLIED MATERIALS / AMAT MIRRA TRAK 200mm

Applied Materials Mirra Trak CMP Tool

Remanufactured and configured for 200mm wafers Includes: - Automatic Wafer Loading and Unloading - Three polish platens (newly refinished) - Four Profiler carriers (upgrade fr. Titan) - HCLU (newly remanufactured) - Three pad conditioners w/universal mounting plates (newly remfr’d) - ISRM EPD, Full Scan, each platen (3) - 5201 Controller with PC workstation - Control carts w/keyboard, monitor, & mouse (2) - Rorze Fabs Unit, w/HEPA - Four axis robot for wafer transfer - Integra double side PVA cleaner - Source Inspection (1 Day per tool) at AT, Chandler Facility. Installation, calibration and start-up support. Warranty: One Year Parts and Emergency Service