PlasmaQuest MOCVD reactor system with Thermal Scrubber and Neslab Chiller & Shimadsu DLI System
PlasmaQuest MOCVD reactor system with Thermal Scrubber and Neslab Chiller & Shimadsu DLI System
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Description
The PlasmaQuest's MOCVD reactor system is a dual-chamber (thermal and plasma) MOCVD reactor with various equipment and peripherals including turbo pump, vane pump, thermal scrubber, chiller, specialty lines for gases/chemical precursors, and DLI system (DLI description in the attached file ). The reactors are capable of handling up to 200 mm (or 8-inch) wafers on a rotatable chuck for deposition and reactive ion etching. Additionally, many view-ports are available for connecting a repertoire of advanced surface analytical equipment for real-time process monitoring. Moreover, the chambers are connected through a load lock and the whole system is interfaced to a PC on an electronics rack. The system can be fully automated for R&D and pilot line.
Specifications
Manufacturer | PlasmaQuest |
Model | MOVCD Reactor |
Condition | Used |
Stock Number | GOD29022016-010 |