Nikon i8A Stepper

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Manufactured                 Aug 1991

Model                               2005i8A

Computer                        PDP11/93  or Nest

Wafer Loader                   Type 1

Wafer Size                        6 inch flat

Indexers                           2

Wafer Loader Pre2          Yes

Reticle Loader                 Open/Close style SU/SD

Libraries                           2

Barcode Reader              Yes

Reticle Size                       5 inch

PPD                                    No

Wafer Chuck                    Ceramic Ring Chuck

LIA                                      Yes

FIA                                     Yes

LSA                                     Yes

FC2                                     ISS

ISS                                      Yes

TTL RA                               Yes

Chip Leveling                    Yes

Autofocus                         single point standard

Wafer stage                      Ballscrew style

LLTC                                   Standard air

Illuminator                       1500 Watt



Tool fully running in our clean room but not tuned the lens or illuminator at present.

We will setup the uniformity and the power next week but uniformity looks like it will come down to about 1.5 % as high at the right just now as running at 2.2% without any adjustment.

Power at 430 mW/cm2 without maxing the lamp and changing optics as we do this as part of the refurb.