Lam 384T 150 MM Oxide Etch Chamber
Lam 384T 150 MM Oxide Etch Chamber
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Description
Drytek/Lam 384T 150 MM Oxide ESC Plasma Etch Process Chamber
Removed from a Drytek 384T
Removed from a Drytek 384T
Specifications
| Manufacturer | LAM |
| Model | 384T Chamber |
| Condition | Used |
| Stock Number | TCBLALOXC |