Zygo Laser Interferometer

Zygo Interferometer Specs:
Weight: 170 lb (77 kg)
Measurement Technique: Phase shifting interferometry

Laser: Type: frequency stabilized Helium-Neon laser with fiber
optic output

Wavelength: 1550 nanometers

Maximum Output Power: <1 milliwatt
Output Power at Instrument Aperture: ?1 milliwatt
Test Beam Diameter: 3 mm
Coherence Length: ?10 meters


Objectives:

Mounting: Dovetail

Type: Infinity Corrected SLWD Mag. N.A. Working Dist.

50X 0.45(1) 13.80 mm

100X 0.73 4.70 mm

(1) 0.38 NA useable


Z-Drive (Focus) Stage:

Motor: DC brushless, microstepper

Drive: leadscrew

Range: 6 in. (152 mm)

Resolution: 4 ?in. (0.1 ?m)

X/Y Stage:

Motor: DC brushless, microstepper

Drive: leadscrew

Range: 6 in. (152 mm)

Resolution: 4 ?in. (0.1 ?m)

Maximum Velocity: 0.50 in/sec (12.7 mm/sec)


Sample Viewing:

Camera Size: 640 x 480 pixels maximum

Viewing: 9 in. monochrome video monitor and MetroPro on-screen
display

Focus: manual or automatic


Test Part Characteristics:

Type: nominally spherical surfaces (using obective) and flat
surfaces(without objective)

Radius of Curvature: from 100 ?m to 3 mm

Reflectivity: 4 to 100 %

Utility Requirements:

Electrical: 90 – 250 VAC, 50/60 Hz (for laser power supply, motor
driver assembly, video monitor, and computer)

The MicroLUPI receives +12 VDC from Zygo Controller Board
installed in the computer.

Compressed Air (for Vibration Isolation Table):60 psi minimum,
with 1/4 in. input


Operating Environment:

Temperature: 15° to 30°C (59° to 86° F)

Rate of Temperature Change: <1.0°C/15 min.

Humidity: 5 to 95% relative, noncondensing

Vibration: Frequency Isolation 1Hz < freq < 120Hz


Compliance:
DHHS Laser Safety Classification: Class II laser
product conforming to NCDRH regulations.