Denton DV-502C (CRYO) Thermal Evaporator

Denton DV-502C (CRYO) Thermal Evaporator

Denton evaporator (DV-502C) is equipped with cryo-pump and diagnostic apparatus:

14” dia. by 18” high Pyrex bell jar and a stainless steel eight port.

Upside down rotary omni substrate holder.

Electrical requirement: 208 V, 4 wire, 60 amp with ground and neutral

Air requirement: 80 to 120 psi at 8 C.F.M. clean/ dry

Water requirement: 7 G.P.M. at 75 to 85?F

Pumping system: Cryo-pump (CTI 100) and mechanical pump (Alcatel 2008: two-
stage, direct drive, 7 C.F.M.)

Vacuum gauges (pressure ranged from micron to atmosphere)

Gas controller: Brooks Instruments gas flow controller (from 0 to 100 sccm of gas
flow)

System controller: microprocessor based controller

Sources: DVI Minigun and CC-100 Ion Source. The resistance source is a 2 KW
source capable of 500 A at 5 V or 200 A at 10 V.