Cymer ELS 4000D Laser System
Cymer ELS 4000D Laser System
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Description
Cymer ELS 4000 Laser System
248nm KrF Excimer DUV laser
Max average power 50 W
Max pulse energy 0.5 J
Duration 10-50 ns
Specifications
| Manufacturer | CYMER |
| Model | ELS-4000D |
| Year | 1993 |
| Condition | Used |
| Stock Number | GOD18012016-086 |